Innovative Particle-Monitoring Technologies
Nano-particle analysis using
dark laser beam sensor
In the Semicon industry wi...
of 1

Nano-particle analysis poster 2014 update 1 (1) FINAL

Published on: Mar 3, 2016
Source: www.slideshare.net


Transcripts - Nano-particle analysis poster 2014 update 1 (1) FINAL

  • 1. Innovative Particle-Monitoring Technologies Nano-particle analysis using dark laser beam sensor In the Semicon industry with patterns down to the 10 nm range, nano-particles contamination affects yield. The detection of these particles down to 20 nm and below is critical for the process. ThecoretechnologyofPMLisbasedupontheuseofastructured dark laser beam which contains a dark line where the light intensity is zero. This structured dark laser beam allows us to mitigate the diffraction limit imposed by the wavelength of the illuminating light, which makes it impossible to detect single particles smaller than this wavelength. A nano-particle analyzer extending into the deep nanometer region is presented The “Individual Particle - Sensing Approach” (IPSA™) Tel: +1-780-378-2862 Cell: +1-780-680-2930 e-mail: info@anms.ca website: www.anms.ca Meir Teichner & Joseph Shamir Signal classification for different particles. The numbers beside the “c” indicates the number of events. The Need The Patented Technology Particle classification20 nano -particle detection Concluding remarks Dark beam illumination was found useful for high resolution particle detection and sizing. Single particle detection is superior to ensemble analysis in terms of resolution and analysis of poly-disperse samples. The ability of the technology to detect 20 nano particles was demonstrated Suitable for in-line operation. Process flow Measurement cell detector Particle flow L E M B CO P D1 D3 D2 The Solution Alberta Nano-Monitoring Systems Ltd.

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